Surface Analysis Laboratory

The instrumentation in the Surface Analysis Laboratory consists of an x-ray photoelectron spectrometer (XPS), an Auger electron spectrometer (AES) and a scanning Auger microprobe. Both AES and XPS can, in general, detect all elements except hydrogen and helium present at levels greater than 0.5 atom % within ~3 nm of a sample surface.
 
XPS can also provide information on chemical bonding based on shifts in peak photoelectron binding energies.  AES is routinely combined with argon ion-sputtering to generate profiles of sample composition as a function of depth.

To discuss your surface analysis needs, please contact Thomas Wittberg, Research Physicist.

The capabilities of the instruments in the Surface Analysis Laboratory are as follows:

Surface Science Labs SSX-100 X-ray Photoelectron Spectrometer (XPS) Elemental analysis for the top ~5 nm of a sample, as well as detailed information about chemical bonding. Small spot analysis using a focused monochromatic aluminum x-ray source.  X-ray spot sizes of 150, 300, 600 and 800 µm can be selected. High energy resolution: A peak width of 0.8 eV (FWHM) is measured for the gold 4f7/2 peak with a 150 µm diameter x-ray spot size.  A differentially pumped ion gun for in-situ sample cleaning or sputter depth profiling.  Advanced data collection and processing using ESCA V2.1 software from Service Physics (Bend OR).

JEOL JAMP-30 Scanning Auger Microprobe Point and line scan Auger analysis Auger mapping to 100 nm resolution Secondary electron imaging to 10 nm Backscatter electron imaging  Single and multipoint depth profiles

Varian Depth Profiling Scanning Auger Spectrometer Point and line scan Auger analysis Point depth profiling Crater-edge profiling (for thick films) Auger mapping with 10 micron resolution Advanced data reduction software